JPH0439569Y2 - - Google Patents

Info

Publication number
JPH0439569Y2
JPH0439569Y2 JP19070486U JP19070486U JPH0439569Y2 JP H0439569 Y2 JPH0439569 Y2 JP H0439569Y2 JP 19070486 U JP19070486 U JP 19070486U JP 19070486 U JP19070486 U JP 19070486U JP H0439569 Y2 JPH0439569 Y2 JP H0439569Y2
Authority
JP
Japan
Prior art keywords
cell
silicon oxide
chamber
flow
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19070486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6393550U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19070486U priority Critical patent/JPH0439569Y2/ja
Publication of JPS6393550U publication Critical patent/JPS6393550U/ja
Application granted granted Critical
Publication of JPH0439569Y2 publication Critical patent/JPH0439569Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Measuring Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP19070486U 1986-12-10 1986-12-10 Expired JPH0439569Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19070486U JPH0439569Y2 (en]) 1986-12-10 1986-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19070486U JPH0439569Y2 (en]) 1986-12-10 1986-12-10

Publications (2)

Publication Number Publication Date
JPS6393550U JPS6393550U (en]) 1988-06-16
JPH0439569Y2 true JPH0439569Y2 (en]) 1992-09-16

Family

ID=31144172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19070486U Expired JPH0439569Y2 (en]) 1986-12-10 1986-12-10

Country Status (1)

Country Link
JP (1) JPH0439569Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002174610A (ja) * 2000-12-08 2002-06-21 Nec Corp バイオセンサ及びバイオセンサを用いた液体試料の測定方法

Also Published As

Publication number Publication date
JPS6393550U (en]) 1988-06-16

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